Applied Surface Science · 2022 · 27 citations · 58 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesThin FilmsAmorphous Electronic MaterialsSemiconductor Device MaterialsSemiconductor Thin FilmsThin Film AnnealingThin-film MaterialsThin-film TransistorsAmorphous Oxide SemiconductorsAnnealing EffectsFerroelectric Field-effect TransistorsGate Dielectric EngineeringHigh PerformanceOxide Thin-film TransistorsSemiconductor Oxide Thin Films
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