Publication | Closed Access
Temperature-dependent oxygen annealing effect on the properties of Ga2O3 thin film deposited by atomic layer deposition
49
Citations
46
References
2022
Year
Materials ScienceTemperature-dependent OxygenEngineeringGa2o3 Thin FilmOxide ElectronicsSurface ScienceApplied PhysicsGallium OxideChemical DepositionAtomic Layer DepositionThin Film Processing
| Year | Citations | |
|---|---|---|
Page 1
Page 1