Solar Energy · 2022 · 28 citations · 30 references
Chemical EngineeringEngineeringPlasma-oxidation Ion-bombardment-induced DamagesApplied PhysicsPecvd P-type TopconGas Discharge PlasmaMicroelectronicsPlasma Processing
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Armin Richter, Jan Benick, Frank Feldmann et al. · Solar Energy Materials and Solar Cells · 2017 · 601 citations · Full text