Haiyang Xing

Highly improved passivation of PECVD p-type TOPCon by suppressing plasma-oxidation ion-bombardment-induced damages

Dian Ma, Wei Liu, Mingjing Xiao et al. · Solar Energy · 2022 · 28 citations

Chemical Engineering, Engineering, Plasma-oxidation Ion-bombardment-induced Damages +5

Plasma treatment for chemical SiOx enables excellent passivation of p-type polysilicon passivating contact featuring the lowest J of ∼6 fA/cm2

Haiyang Xing, Zunke Liu, Zhenhai Yang et al. · Solar Energy Materials and Solar Cells · 2023 · 24 citations

Materials Science, Chemical Engineering, Ion Implantation +7

Emitter formation with boron diffusion from PECVD deposited boron-doped silicon oxide for high-efficiency TOPCon solar cells

Hao Cheng, Wei Liu, Zunke Liu et al. · Solar Energy Materials and Solar Cells · 2022 · 22 citations

Materials Science, Electrical Engineering, Boron Diffusion +9

Excellent surface passivation of p-type TOPCon enabled by ozone-gas oxidation with a single-sided saturation current density of ∼ 4.5 fA/cm2

Na Lin, Zhenhai Yang, Haojiang Du et al. · Solar Energy · 2023 · 21 citations

Chemical Engineering, Engineering, Oxidation Resistance +6

Effects of PECVD preparation conditions and microstructures of boron-doped polysilicon films on surface passivation of p-type tunnel oxide passivated contacts

Yuheng Zeng, Dian Ma, Zunke Liu et al. · Materials Science in Semiconductor Processing · 2022 · 11 citations

Materials Engineering, Materials Science, Boron-doped Polysilicon Films +9