A micromachined gas sensor based on a catalytic thick film/SnO2 thin film bilayer and thin film heater

A substrate for thin-film gas sensors in microelectronic technology

U. Dibbern · Sensors and Actuators B Chemical · 1990 · 100 citations

Electrical Engineering, Engineering, Microfabrication +9

Study on the sensing mechanism of tin oxide flammable gas sensors using the Hall effect

Masamichi Ippommatsu, Hisao Ohnishi, Hirokazu Sasaki et al. · Journal of Applied Physics · 1991 · 61 citations

Flammable Gas Sensors, Engineering, Gas Sensor +17

Very low power consumption micromachined CO sensors

G. Faglia, Elisabetta Comini, Alessandra Cristalli et al. · Sensors and Actuators B Chemical · 1999 · 54 citations

Low Power Consumption, Electrical Engineering, Energy Harvesting +7

An integrated gas sensor based on tin oxide thin-film and improved micro-hotplate1Paper presented at the 2nd Asia Conference on Chemical Sensors, Xi'an, P.R. China, 1995.1

Zhenan Tang, Samuel Fung, Darwin T.W Wong et al. · Sensors and Actuators B Chemical · 1998 · 32 citations

Materials Science, Chemical Engineering, Engineering +12

Fabrication of a micro catalytic gas sensor using thin film process and Si anisotropic etching techniques

Jae Suk Lee, Jong Wan Park, Sang Mo Shin · Sensors and Actuators B Chemical · 1997 · 19 citations

Materials Science, Chemical Engineering, Thin Film Process +10