Concepedia
Journal of Electroceramics · 2004 · 68 citations · 8 references
EngineeringElectrical EngineeringPhysicsAcousticsMicroelectromechanical SystemsMicrowave EngineeringAcoustic Wave PropagationMems ResonatorsMicrowave FiltersMicrowave ResonatorsResonant CircuitsRf MemsAcoustic Wave FiltersMicrowave Filter DesignResonator Design
8
Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications
M.-A. Dubois, Paul Muralt · Applied Physics Letters · 1999 · 439 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
High-Q microwave acoustic resonators and filters
K.T. McCarron · IEEE Transactions on Microwave Theory and Techniques · 1993 · 314 citations
Engineering, Electrical Engineering, Materials Science +17
Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering
M.-A. Dubois, Paul Muralt · Journal of Applied Physics · 2001 · 300 citations · Full text
Development of miniature filters for wireless applications
K.M. Lakin, G.R. Kline, K.T. McCarron · IEEE Transactions on Microwave Theory and Techniques · 1995 · 199 citations
General one-dimensional treatment of the layered piezoelectric resonator with two electrodes
H. Nowotny, E. Benes · The Journal of the Acoustical Society of America · 1987 · 142 citations
Engineering, Electrical Engineering, Crystal Structure +13