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Sticking and recombination of the SiH3 radical on hydrogenated amorphous silicon: The catalytic effect of diborane
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1989
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Materials EngineeringChemical EngineeringEngineeringSih3 RadicalCatalytic EffectSurface ScienceSiliceneAmorphous SiliconSemiconductor Device FabricationHydrogenChemistryAmorphous SolidSilicon On Insulator
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