Spectroscopic diagnostics of temperature-controlled trench etching of silicon - Concepedia

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Spectroscopic diagnostics of temperature-controlled trench etching of silicon

10

Citations

11

References

1995

Year

Ole Krogh, Robert N. Carlile, R.N. Nowlin

Plasma Chemistry and Plasma Processing

EngineeringPhysicsMicrofabricationApplied PhysicsTemperature-controlled Trench EtchingInstrumentationSilicon On InsulatorMicroelectronicsPlasma EtchingSilicon Debugging

References

	Year	Citations

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