Multi-Sensor System for Real-Time Monitoring of Laser Micro-Structuring

Abstract

Constant demand for increase in efficiency of USP-laser micromachining, leading to growing pulse repetition rates and scanning speeds, makes the online process monitoring and control progressively more challenging. However, real-time process monitoring is essential in order to predict the quality of the processing result, accelerate parameter studies or discover processing errors during the machining. Fraunhofer ILT develops a multi-sensor system to meet this challenge, collecting diverse real-time data on the process and its environment with a high sampling rate and spatial resolution.