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Two-Inch Aluminum Nitride (AIN) Single Crystal Growth for Commercial Applications
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2021
Year
Aluminium NitrideShort Wavelength OpticOptical MaterialsEngineeringCrystal Growth TechnologyOptoelectronic DevicesBulk Single CrystalsAluminum NitrideTwo-inch Aluminum NitrideSuch 2-Inch WafersMaterials EngineeringMaterials SciencePhotoluminescenceOptoelectronic MaterialsNew Lighting TechnologyMicrostructureSolid-state LightingApplied PhysicsOptoelectronics
Aluminum nitride (AlN) bulk single crystals were grown using physical vapor transport method. The resulting wafers were characterized according to the requirements for electronic device applications. Currently many thousands per year of such 2-inch wafers are used as substrates for UVC-LEDs emitting in the range 215 nm – 270 nm, which is the most efficient germicidal range for many pathogens. Highest crystallinity and the lowest published UV-transparency are confirmed by standard analytical techniques.