Direct Nanolithography of Organic Polysilane Films Using Carbon Nanotube Tips

Abstract

Nanolithography of polysilane films is performed by means of a tapping-mode-scanning probe microscope (SPM) equipped with a carbon nanotube tip. The tapping mode enables us to perform finer lithography than that by the contact mode. Electrons injected from the tip directly groove the polysilane film. A constant current operation is more stable in the tapping-mode lithography than a constant bias voltage operation. The mechanism of direct lithography is discussed on the basis of the model that the excess electrons in the Si backbone break Si-Si bonds.