Modeling and vector control of planar magnetic levitator

Abstract

The authors designed and implemented a magnetically levitated stage with large planar motion capability. This planar magnetic levitator employs four novel permanent-magnet linear motors. Each motor generates vertical force for suspension against gravity, as well as a horizontal force for drive. These linear levitation motors can be used as building blocks in the general class of multi-degree-of-freedom motion stages. In this paper, they discuss the electromechanical modeling and real-time vector control of such a permanent-magnet levitator. They describe the dynamics in a dq frame introduced to decouple the forces acting on the magnetically levitated moving part, namely, the platen. A transformation similar to the Blondel-Park transformation is derived for commutation of the stator phase currents. They provide test results on step responses of the magnetically levitated stage. They show 5 nm RMS positioning noise in x and y, which demonstrates the applicability of such stages in the next-generation photolithography in semiconductor manufacturing.