Publication | Closed Access
High-stability bimorph scanning tunneling microscope
25
Citations
13
References
1987
Year
EngineeringMicroscopyMechanical EngineeringAluminum HolderNovel ScanningVibrationsTunneling MicroscopyMicroscopy MethodTunnelingPiezoelectric MaterialInstrumentationMaterials SciencePhysicsMechanical DesignHigh-stability BimorphPiezoelectricityMicroelectronicsMicrofabricationScanning Probe MicroscopySurface ScienceApplied PhysicsBimorph Piezoelectric DisksMicromachined Ultrasonic Transducer
A novel scanning tunneling microscope (STM) is described which is constructed almost entirely of aluminum and uses bimorph piezoelectric disks as the x,y,z drive elements. The design uses a simple, rugged tripod configuration for the fine motion drive arms. Coarse motion of the sample, which is mounted on an aluminum holder, is achieved by pushing or pulling, with a piezoelectric louse. Differential thermal expansion effects are avoided by design, to first order, and the resulting drift is ≤0.5 Å/min after only a short warm-up period. It is easy to build and operate, and has good immunity to mechanical vibrations. The frequency response is flat to 5 kHz. The x,y,z drive sensitivity is 8 Å/V and the range is ≥12000 Å. Some preliminary experimental results are presented, including atomic resolution images in air, of graphite and NbSe2.
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