Rate-determining reactions and surface species in CVD of silicon

Growth kinetics and capture of impurities during gas phase crystallization

A. A. Chernov · Journal of Crystal Growth · 1977 · 94 citations

Natural Sciences, Materials Engineering, Materials Science +14

Chemical Processes in Vapor Deposition of Silicon: I . Deposition from and Etching by

Vladimir S. Ban, Stephen L. Gilbert · Journal of The Electrochemical Society · 1975 · 83 citations

Natural Sciences, Chemistry, Materials Science +15

Rate-determining reactions and surface species in CVD of silicon

J. Bloem, W. A. P. Claassen · Journal of Crystal Growth · 1980 · 62 citations

Natural Sciences, Materials Engineering, Materials Science +14

Surface morphology of HCl etched silicon wafers

P. van der Putte, L.J. Giling, J. Bloem · Journal of Crystal Growth · 1977 · 55 citations

Engineering, Materials Engineering, Materials Science +14

Inelastic light scattering studies of chemical vapor deposition systems

J.E. Smith, T. O. Sedgwick · Thin Solid Films · 1977 · 29 citations

Natural Sciences, Materials Science, Physics +14