Investigation and compensation of the nonlinearity of heterodyne interferometers

Residual errors in laser interferometry from air turbulence and nonlinearity

Norman Bobroff · Applied Optics · 1987 · 141 citations

Natural Sciences, Physics, Optics +16

Optical sources of non-linearity in heterodyne interferometers

Alan E. Rosenbluth, Norman Bobroff · Precision Engineering · 1990 · 118 citations

Natural Sciences, Electrical Engineering, Physics +13

Non-linearity in length measurement using heterodyne laser Michelson interferometry

C M Sutton · Journal of Physics E Scientific Instruments · 1987 · 106 citations

Engineering, Physics, Instrumentation +16

Sub-micron position measurement and control on precision machine tools with laser interferometry

Charles R. Steinmetz · Precision Engineering · 1990 · 104 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +16

A new laser measurement system for precision metrology

Gary E. Sommargren · Precision Engineering · 1987 · 57 citations

Engineering, Manufacturing Engineering, Instrumentation +13