Publication | Closed Access
Micro-effects of resputtering due to negative ion bombardment of growing thin films
20
Citations
19
References
1993
Year
Materials ScienceIon ImplantationEngineeringMicrofabricationSurface ScienceApplied PhysicsIon BeamNegative Ion BombardmentThin FilmsChemical DepositionIon EmissionMicrostructure
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