Hydrogen implantation-induced blistering in diamond: Toward diamond layer transfer by the Smart Cut™ technique

Ion bombardment induced buried lateral growth: the key mechanism for the synthesis of single crystal diamond wafers

M. Schreck, S. Gsell, Rosaria Brescia et al. · Scientific Reports · 2017 · 249 citations · Full text

Natural Sciences, Materials Science, Physics +15

Smart-Cut: A New Silicon On Insulator Material Technology Based on Hydrogen Implantation and Wafer Bonding^*1

M. Bruel, Bernard ASPAR Andre-Jacques AUBERTON-HERVE · Japanese Journal of Applied Physics · 1997 · 242 citations

Engineering, Materials Engineering, Materials Science +17

Layer splitting process in hydrogen-implanted Si, Ge, SiC, and diamond substrates

Qiaoling Tong, Karsten Gutjahr, S. Hopfe et al. · Applied Physics Letters · 1997 · 222 citations

Engineering, Materials Engineering, Materials Science +17

Single-crystal diamond plate liftoff achieved by ion implantation and subsequent annealing

N.R. Parikh, John Hunn, E. McGucken et al. · Applied Physics Letters · 1992 · 154 citations

Natural Sciences, Materials Engineering, Materials Science +12

Synthesis of large single crystal diamond plates by high rate homoepitaxial growth using microwave plasma CVD and lift-off process

Yoshiaki Mokuno, Akiyoshi Chayahara, Hideaki Yamada · Diamond and Related Materials · 2008 · 126 citations

Natural Sciences, Materials Engineering, Materials Science +16