The effect of post-deposition annealing on the chemical, structural and electrical properties of Al/ZrO2/La2O3/ZrO2/Al high-k nanolaminated MIM capacitors - Concepedia

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The effect of post-deposition annealing on the chemical, structural and electrical properties of Al/ZrO2/La2O3/ZrO2/Al high-k nanolaminated MIM capacitors

13

Citations

31

References

2022

Year

Sumit Patil, Viral Barhate, Vilas Patil, Khushabu Agrawal, Ashok M. Mahajan

Journal of Materials Science Materials in Electronics

Materials ScienceMaterials EngineeringChemical EngineeringElectrical EngineeringEngineeringMaterial AnalysisGallium OxideAl/zro2/la2o3/zro2/al High-kElectrical PropertiesMim Capacitors

References

	Year	Citations

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