Concepedia

Sumit Patil

SP

Statistics

Publications

3

Citations

47

H-Index

3

Active since

2018

Affiliations

Kavayitri Bahinabai Chaudhari North Maharashtra University(Current)

Sumit Patil is an author at Kavayitri Bahinabai Chaudhari North Maharashtra University specializing in materials engineering, materials science, and plasma-enhanced atomic layer deposition.

ORCID

Publications per year

2018–2022

3

Publications

3

XPS study of homemade plasma enhanced atomic layer deposited La <sub>2</sub> O <sub>3</sub> /ZrO <sub>2</sub> bilayer thin films

Vilas Patil, Khushabu Agrawal, Viral Barhate et al. · Semiconductor Science and Technology · 2018 · 24 citations

, , +17

The effect of post-deposition annealing on the chemical, structural and electrical properties of Al/ZrO2/La2O3/ZrO2/Al high-k nanolaminated MIM capacitors

Sumit Patil, Viral Barhate, Vilas Patil et al. · Journal of Materials Science Materials in Electronics · 2022 · 13 citations

, , +16

Spectroscopic study of La<sub>2</sub>O<sub>3</sub> thin films deposited by indigenously developed plasma-enhanced atomic layer deposition system

Viral Barhate, Khushabu Agrawal, Vilas Patil et al. · International Journal of Modern Physics B · 2018 · 10 citations

, , +17

1–3 of 3