Concepedia

Publication | Open Access

Spatial modulation of nanopattern dimensions by combining interference lithography and grayscale-patterned secondary exposure

DOIFull Paper Access

29

Citations

42

References

2022

Year

Zhuofei Gan, Hongtao Feng, Liyang Chen, Siyi Min, Chuwei Liang, Menghong Xu, Zijie Jiang, Zhao Sun, Chuying Sun, Dehu Cui,
Light Science & Applications

References

YearCitations

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