Structural and optical properties of r.f.-sputtered SixC1 − x:O films

E. Ech‐chamikh, E.L. Ameziane, A. Bennouna, M. Azizan, T.A. Nguyen Tan, T. López-Rı́os

Thin Solid Films · 1995 · 22 citations · 35 references

Concepts

References

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