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A novel approach to obtain near damage-free surface/subsurface in machining of single crystal 4H-SiC substrate using pure metal mediated friction

Materials EngineeringMaterials ScienceEngineeringMicrofabricationPure MetalMaterial MachiningSurface ScienceMechanical EngineeringApplied PhysicsDamage-free Surface/subsurfaceNovel ApproachCarbideSurface ProcessingMicrostructure