Ultra-Low Relative Frequency Split Piezoelectric Ring Resonator Designed for High-Performance Mode-Matching Gyroscope

Abstract

This letter presents a high-performance piezoelectric ring resonator with ultra-low relative frequency split designed for mode-matching gyroscope. Design optimization for supporting dog-leg shaped spokes and passive temperature compensation are implemented in order to minimize the frequency split and improve the temperature stability. The reported piezoelectric ring resonator is driving and sensing in a pair of degenerate third-order wineglass modes. It achieves an ultra-low relative frequency split of 11.2 ppm at its resonant frequency of 456.68 kHz. The maximum variation of the relative frequency split is smaller than 12.32 ppm within the temperature range of 25 °C to 125 °C. This work offers a new insight on the design of resonator gyroscope with low frequency split and good temperature stability. [2021-0170]