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Accelerated C-face polishing of silicon carbide by alkaline polishing slurries with Fe3O4 catalysts

Materials EngineeringMaterials ScienceChemical EngineeringC-face PolishingEngineeringPowder MetallurgyMaterial ProcessingCorrosionSurface ScienceSilicon CarbideSurface TreatmentFe3o4 CatalystsSurface PolishingSurface ProcessingCarbide