Publication | Open Access
Dewetting of Ni silicide thin film on Si substrate: In-situ experimental study and phase-field modeling
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Citations
37
References
2021
Year
Materials ScienceSi SubstrateEngineeringPhysicsMicrofabricationIn-situ Experimental StudySurface ScienceApplied PhysicsPhase-field ModelingSiliceneSemiconductor Device FabricationThin FilmsSilicon On InsulatorChemical Vapor DepositionThin Film Processing
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