Detailed phisyco-chemical characterization of the multilayered thin films based on titanium oxynitride and copper doped titanium nitride obtained by different PVD techniques

Vukoman Jokanović, Nenad Bundaleski, Manuela Ferarra, Bojan Jokanović, Slavoljub Živković, Ilija Nasov

Vacuum · 2021 · 13 citations · 42 references

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