Concepedia

Effects of oxygen sources on properties of atomic-layer-deposited ferroelectric hafnium zirconium oxide thin films

Ah-Jin Cho, Jihoon Jeon, Hong Keun Chung, In‐hwan Baek, Kun Yang, Min Hyuk Park, Seung‐Hyub Baek, Seong Keun Kim

Ceramics International · 2021 · 19 citations · 32 references

DOI

Concepts

References

32

Ferroelectricity in hafnium oxide thin films

T. S. Böscke, Johannes Müller, D. Bräuhaus et al. · Applied Physics Letters · 2011 · 2.7K citations

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Ferroelectricity in Simple Binary ZrO<sub>2</sub> and HfO<sub>2</sub>

Johannes Müller, T. S. Böscke, U. Schröder et al. · Nano Letters · 2012 · 1.7K citations

, , +17

First-principles study of structural, vibrational, and lattice dielectric properties of hafnium oxide

Xinyuan Zhao, David Vanderbilt · Physical review. B, Condensed matter · 2002 · 711 citations · Full text

, , +17

Ferroelectricity in yttrium-doped hafnium oxide

Johannes Müller, U. Schröder, T. S. Böscke et al. · Journal of Applied Physics · 2011 · 693 citations · Full text

, , +17

Review and perspective on ferroelectric HfO2-based thin films for memory applications

Min Hyuk Park, Young Hwan Lee, Thomas Mikolajick et al. · MRS Communications · 2018 · 557 citations · Full text

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