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Enhancing the ductile machinability of single-crystal silicon by laser-assisted diamond cutting

Materials ScienceLaser-assisted Diamond CuttingDiamond-like CarbonEngineeringMaterial ProcessingMicrofabricationSingle-crystal SiliconMaterial MachiningMechanical EngineeringApplied PhysicsFabrication TechniqueSolid MechanicsDuctile MachinabilitySilicon On InsulatorMicrostructure