The International Journal of Advanced Manufacturing Technology · 2021 · 47 citations · 47 references
EngineeringMaterials EngineeringMaterials ScienceMechanical Behavior Of MaterialsMicrofabricationSolid MechanicsDuctilityLaser CuttingLaser Material ProcessingMachiningMicrostructure ControlSilicon MaterialsCrystalline SiliconLaser Cutting InstrumentsMachinabilitySilicon Mechanical PropertiesSilicon MicrostructuresSingle-crystal SemiconductorsSingle-crystal Silicon
47
Manufacturing and measurement of freeform optics
Fengzhou Fang, X.D. Zhang, Albert Weckenmann et al. · CIRP Annals · 2013 · 814 citations