Applied Sciences · 2021 · 12 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceCrystal StructureDigital ImagingOpticsCrystal LatticeDeformation MechanismsDiffractionDislocation MechanicsX-ray DiffractionBragg DiffractionDislocation Burgers VectorsDislocation CharacterizationDislocation DensityDislocationsLattice DistortionReflectanceReflectance Maps
We observe a long-range distortion field between parallel dislocations with opposite Burgers vectors in a platelet-shaped single crystal of 4H-SiC with a low dislocation density (~103 cm/cm3). This distortion field is in the µradian range when the distance D between dislocations is in the ~50–250 µm range. We were able to characterise this weak distortion field through Rocking Curve Imaging (RCI), a highly sensitive Bragg diffraction imaging technique using monochromatic synchrotron radiation. From the experimental images, we generate maps of the angle of maximum reflectance (“peak position”) that provide a measurement of the local lattice orientation. Deviations from the crystal matrix orientation are associated with the long-range distortion field around dislocations. Between parallel dislocations with opposite Burgers vectors, this distortion does not decay to zero but towards a constant value α. We propose a simple model considering the angular parameter α characterising the distortion. This model indicates that α should roughly vary as 1/D. This appears to be in fair agreement with our experimental data.
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μm-resolved high resolution X-ray diffraction imaging for semiconductor quality control
D. Lübbert, Tilo Baumbach, J. Härtwig et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2000 · 97 citations
Natural Sciences, Materials Engineering, Materials Science +14