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Reduction of threading dislocation densities of N-polar face-to-face annealed sputtered AlN on sapphire

Materials ScienceMaterials EngineeringDislocation DensitiesAluminium NitrideEngineeringDislocation InteractionPhysicsSputtered AlnSurface ScienceApplied PhysicsAluminum Gallium NitrideMultilayer HeterostructuresN-polar Face-to-faceMicrostructure