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Impact of deposition temperature on microstructure and properties of erbium oxide antireflective films deposited on CVD diamond substrates

Materials ScienceMaterials EngineeringAntireflective FilmsDiamond-like CarbonEngineeringCvd Diamond SubstratesSurface ScienceApplied PhysicsChemical DepositionEpitaxial GrowthDeposition TemperatureChemical Vapor DepositionThin Film Processing