Journal of Manufacturing Processes · 2021 · 79 citations · 54 references
EngineeringMaterials EngineeringMaterials ScienceComputational Materials ScienceNanomaterialsNanotechnologyDamage MechanicsFracture MechanicsHigh-temperature MaterialsMachiningNanomechanicsSilicon MaterialsFracture Mechanics Of NanomaterialsMaterial Behaviour At Elevated TemperaturesNumerical ModellingSilicon DefectsSingle-crystal SemiconductorsSingle-crystal SiliconSubstrate CuttingSubsurface Damage Reduction
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