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Numerical investigation on subsurface damage in nanometric cutting of single-crystal silicon at elevated temperatures

Materials ScienceSubsurface DamageEngineeringMicrofabricationNanometric CuttingApplied PhysicsSolid MechanicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsMechanics Of MaterialsMicrostructureSilicon DebuggingNumerical Investigation