Applied Surface Science · 2021 · 30 citations · 33 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ChemistrySurface ScienceAtomic Layer DepositionSemiconductor SurfacesSurface Chemistry Of SolidsSurface ModificationSurface PreparationThin-film DepositionAtomic Layer Deposition InterfacesAtomic Layer Deposition PrecursorsMetal-organic Chemical Vapor DepositionOxide Film FormationTitanium Surface ModificationVapor-phase Synthesis
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