Concepedia
2001 · 11 citations · 1 references
EngineeringImplant DentistryMicroelectromechanical SystemsDevice DesignImplant TechnologyImplantable Biomedical DevicesImplantable MicrosystemsImplant Angle Optimization
1
Design and integration considerations for end-of-the roadmap ultrashallow junctions
C. M. Osburn, Ishani De, K. F. Yee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 26 citations
Engineering, Electrical Engineering, Materials Science +17