Concepedia

Chlorine doping of MoSe<sub>2</sub> flakes by ion implantation

Sławomir Prucnal, Arsalan Hashemi, Mahdi Ghorbani‐Asl, René Hübner, Juanmei Duan, Yidan Wei, Divanshu Sharma, Dietrich R. T. Zahn, René Ziegenrücker, Ulrich Kentsch,

Nanoscale · 2021 · 38 citations · 56 references

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Concepts

Abstract

Controlled doping of MoSe<sub>2</sub> realized by low-energy ion implantation and millisecond-range intense pulse light annealing.

References

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