Combined reactive plasma jet-laser etching method for technical optical glass containing metal oxides

Ultrashort-pulse laser machining of dielectric materials

M. D. Perry, Brent C. Stuart, P.S. Banks et al. · Journal of Applied Physics · 1999 · 496 citations

Engineering, Materials Engineering, Materials Science +17

Laser ablation of dielectrics with pulse durations between 20 fs and 3 ps

Wolfgang Kautek, Jörg Krüger, M. Lenzner et al. · Applied Physics Letters · 1996 · 220 citations

Natural Sciences, Materials Engineering, Materials Science +17

Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook

Thomas Arnold, G. Böhm, Renate Fechner et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2009 · 212 citations

Engineering, Materials Engineering, Materials Science +16

Large area smoothing of surfaces by ion bombardment: fundamentals and applications

Frank Frost, Renate Fechner, B. Ziberi et al. · Journal of Physics Condensed Matter · 2009 · 153 citations

Engineering, Materials Engineering, Materials Science +17

Micromachining of transparent materials with super-heated liquid generated by multiphotonic absorption of organic molecule

Jun Wang, Hiroyuki Niino, Akira Yabe · Applied Surface Science · 2000 · 90 citations

Engineering, Materials Engineering, Materials Science +13