Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2009 · 212 citations · 19 references
EngineeringMaterials EngineeringMaterials ScienceMaterials ProcessingSurface EngineeringSurface SciencePlasma Surface TreatmentPlasma-surface InteractionsSurface Finish QualitySurface FinishesSurface FinishingSurface PreparationFocused Ion Beam MachiningIon Beam EtchingIon Beam Surface TreatmentPlasma-assisted CoatingPrecision Surface FinishingSurface Finish EnhancementUltra-precision Machining
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