Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook

Thomas Arnold, G. Böhm, Renate Fechner, Johannes Meister, Andreas Nickel, Frank Frost, T. Hänsel, A. Schindler

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2009 · 212 citations · 19 references

Concepts

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