Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook - Concepedia

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Ultra-precision surface finishing by ion beam and plasma jet techniques—status and outlook

206

Citations

19

References

2009

Year

Thomas Arnold, G. Böhm, Renate Fechner, Johannes Meister, Andreas Nickel, Frank Frost, T. Hänsel, A. Schindler

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment

Materials ScienceEngineeringUltra-precision Surface FinishingMicrofabricationSurface ScienceSurface FinishingPlasma Jet Techniques—statusIon BeamSurface TreatmentSurface FinishSurface PolishingSurface ProcessingPlasma Processing

References

	Year	Citations

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