Publication | Closed Access

Femtosecond laser single step, full depth cutting of thick silicon sheets with low surface roughness

Advanced Laser ProcessingEngineeringMicrofabricationLaser Micro-processingLow Surface RoughnessMechanical EngineeringApplied PhysicsThick Silicon SheetsLaser AblationFabrication TechniqueLaser Processing TechnologyFull Depth CuttingLaser-assisted Deposition3D Printing