Atomic layer deposition of palladium coated TiO2/Si nanopillars: ToF-SIMS, AES and XPS characterization study

Igor Iatsunskyi, Gloria Gottardi, V. Micheli, R. Canteri, Emerson Coy, Mikhaël Bechelany

Applied Surface Science · 2020 · 68 citations · 32 references

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