Atomic layer deposition of ZnS nanotubes

Abstract

Abstract. We report on growth of high-aspect-ratio (> ∼ 300) zinc sulfide nanotubes with variable, precisely tunable, wall thicknesses and tube diameters into highly ordered pores of anodic alumina templates by atomic layer deposition (ALD) at temperatures as low as 75 ◦ C. Various characterization techniques are employed to gain information on the composition, morphology, and crystal structure of the synthesized samples. Besides practical applications, the ALD-grown tubes could be envisaged as model systems for the study of a certain class of size-dependent quantum and classical phenomena. Submitted to: NanotechnologyAtomic layer deposition of ZnS nanotubes 2 Functional nanostructures are currently subjects of increasing interest. This is mainly due to the recent advances in the nanofabrication techniques and a better control on the confinement geometry and growth conditions of the low-dimensional systems. In this respect, semiconducting nanowires are of particular importance. On the one hand, they can be utilized in highly efficient optical, electronic, biological, and sensing devices and, on the other hand, they can equally be exploited as model systems for the study