Publication | Closed Access
Smart Cut™ Piezo On Insulator (POI) substrates for high performances SAW components
52
Citations
2
References
2020
Year
Unknown Venue
Materials ScienceElectrical EngineeringSmart Cut™ PiezoEngineeringMicrofabricationApplied PhysicsHigh PerformancesSaw DevicesPiezoelectricityPiezoelectric MaterialThin FilmsSmart Cut™ TechnologyMicroelectronicsFrequency Control
High quality single crystal LiTaO3 thin film transfer using Smart Cut™ technology has been demonstrated. Piezo On Insulator (POI) characteristics were optimized to the benefit of the guided SAW resonator performance. We will correlate these substrate parameters with some key figures of merit of guided SAW devices in terms of frequency control, k2, Q factor.
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