Design and fabrication of a differential pressure MEMS capacitance diaphragm gauge based on heavily boron-doping technique - Concepedia

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Design and fabrication of a differential pressure MEMS capacitance diaphragm gauge based on heavily boron-doping technique

13

Citations

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References

2020

Year

Xin Ke, Gang Li, Xiaodong Han, Yongjun Cheng, Wenjun Sun, Mahui Xu, Huiying Chen, Chenxi Zhao, Detian Li

Electrical EngineeringEngineeringMicrofabricationMechanical EngineeringBoron-doping TechniqueInstrumentationMicroelectronicsMicro-electromechanical System

References

	Year	Citations

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