Practical guide for curve fitting in x-ray photoelectron spectroscopy

Abstract

The use of peak fitting to extract information from x-ray photoelectron spectroscopy (XPS) data is of growing use and importance. Due to increased instrument accessibility and reliability, the use of XPS instrumentation has significantly increased around the world. However, the increased use has not been matched by the expertise of the new users, and the erroneous application of curve fitting has contributed to ambiguity and confusion in parts of the literature. This guide discusses the physics and chemistry involved in generating XPS spectra, describes good practices for peak fitting, and provides examples of appropriate use along with tools for avoiding mistakes.