Publication | Open Access
Failure modes of protection layers produced by atomic layer deposition of amorphous TiO<sub>2</sub> on GaAs anodes
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Citations
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References
2020
Year
Short-term Protective PerformanceEngineeringSemiconductor MaterialsGaas AnodesSemiconductor DeviceSemiconductorsExtrinsic Pinhole DefectsCompound SemiconductorAtomic Layer DepositionMaterials ScienceSemiconductor TechnologyCrystalline DefectsPhysicsSemiconductor MaterialSemiconductor Device FabricationApplied PhysicsThin FilmsProtection LayersFailure Modes
Extrinsic pinhole defects formed during deposition and testing control the short-term protective performance of the a-TiO<sub>2</sub> film for GaAs anodes evolving O<sub>2</sub> from water
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