High-Density and Large-Scale MEA System Featuring 236,880 Electrodes at 11.72μm Pitch for Neuronal Network Analysis

Abstract

Microelectrode arrays (MEAs) allow us to observe electrical activities from neurons at multiple sites. This paper presents a high-density microelectrode array (HD-MEA) for observing neuronal networks at a cellular level, featuring 236,880 electrodes at an 11.72 μm pitch and 33,840 readout channels with a noise level of 5.5 μVrms. The Peltier cooling system is integrated to maintain the temperature of the electrodes at approximately 37 °C. Moreover, electrical signals for the axonal propagation of rat neurons are successfully recorded.