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High-efficiency synthesis of large-area monolayer WS2 crystals on SiO2/Si substrate via NaCl-assisted atmospheric pressure chemical vapor deposition

Materials ScienceEngineeringLayered MaterialNanotechnologySurface ScienceApplied PhysicsSio2/si SubstrateChemical DepositionHigh-efficiency SynthesisChemical Vapor DepositionSilicon On Insulator