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High-aspect-ratio crack-free microstructures fabrication on sapphire by femtosecond laser ablation

Materials ScienceAdvanced Laser ProcessingEngineeringMicrofabricationMicrostructureFemtosecond Laser AblationMechanical EngineeringApplied PhysicsLaser AblationLaser Processing TechnologyLaser-assisted DepositionUltrafast Lasers