Surface and Coatings Technology · 2020 · 42 citations · 29 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ChemistryThin FilmsElectrode MaterialsMetal-semiconductor ContactsSemiconductor InterfacesSemiconductor Thin FilmsThin-film DepositionThin-film MaterialsElectrodepositionSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon NitrideSilicon Nitride Ceramics
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