Methane as a novel doping precursor for deposition of highly conductive ZnO thin films by magnetron sputtering

A. V. Vasin, A.V. Rusavsky, Eugene G. Bortchagovsky, Y. V. Gomeniuk, V. V. Strelchuk, Roman Yatskiv, Stanislav Tiagulskyi, Sławomir Prucnal, W. Skorupa, A. N. Nazarov

Vacuum · 2020 · 16 citations · 34 references

Concepts

References

34