Methane as a novel doping precursor for deposition of highly conductive ZnO thin films by magnetron sputtering - Concepedia

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Methane as a novel doping precursor for deposition of highly conductive ZnO thin films by magnetron sputtering

16

Citations

34

References

2020

Year

A. V. Vasin, A.V. Rusavsky, Eugene G. Bortchagovsky, Y. V. Gomeniuk, V. V. Strelchuk, Roman Yatskiv, Stanislav Tiagulskyi, Sławomir Prucnal, W. Skorupa, A. N. Nazarov

Materials ScienceMaterials EngineeringEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsNovel Doping PrecursorMagnetron SputteringThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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