Formation of U-shaped diamond trenches with vertical {111} sidewalls by anisotropic etching of diamond (110) surfaces

Masatsugu Nagai, Yuto Nakamura, Tatsuro Yamada, Taira Tabakoya, Tsubasa Matsumoto, Tsubasa Inokuma, Christoph E. Nebel, Toshiharu Makino, Satoshi Yamasaki, Norio Tokuda

Diamond and Related Materials · 2020 · 20 citations · 26 references

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